Femtosecond Pulsed-Laser: The femtosecond laser system (Clark-MXR-CPA series) can be used for micro-/nanoscale device fabrication by using ultrashort pulse energy that minimizes any thermal damage or cracks. Typical materials that can be machined include glass, quartz, fused-silica, polymers, and metallic materials. The minimum feature size is as small as 200nm.
Assisted High-Precision Magnetic Suspension Stage:
Three-Axial Sputtering Machine: